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Low Stress Dielectric Photoresist capable of
3-10µm in a single spin

Material Attributes:
No warpage due to low shrinkage and tensile modulus
Solvent developable
i-Line/broadband sensitivity, 1:1 aspect ratio imaging
Low-temperature processing (< 200°C)
Good electrical properties
High thermal and chemical stability
Low moisture uptake

Applications:
Stress buffer
Passivation and protective layers

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KMSF® 1000 is a negative tone, polyimide-based photo-dielectric for use as an ultra-low stress
buffer, passivation or protective layer.

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KMSF®

KMSF®

KMSF® 1000

A-Gas Electronic Materials