KMSF® 1000

KMSF® 1000 is a negative tone, polyimide-based photo-dielectric for use as an ultra-low
stress buffer, passivation or protective layer.

  • KMSF® 1000

    Low Stress Dielectric Photoresist capable of 3-10µm in a single spin

    Material Attributes:
    No warpage due to low shrinkage and
    tensile modulus
    Solvent developable
    i-Line/broadband sensitivity, 1:1 aspect
    ratio imaging
    Low temperature processing (< 200°C)
    Good electrical properties
    High thermal and chemical stability
    Low moisture uptake

    Stress buffer
    Passivation and protective layers