mr-I T85 – Polymer for lab-on-a-chip, optical and bio applications
– Non-polar thermoplastic
– Excellent film quality
– Beneficial flow behaviour during imprinting, low imprint pressure
– Excellent UV and optical transparency
– High plasma etch resistance
– Superior plasma etch resistance when compared to SU8
– selectivity to silicon 9:1 (Si / mr-I T85)
– High chemical stability
– high resistance to acids, bases and polar solvents
– no interactions with conventional photoresists
Product Features:
mr-I T85 – Polymer for lab-on-a-chip, optical and bio applications
– Non-polar thermoplastic
– Excellent film quality
– Beneficial flow behaviour during imprinting, low imprint pressure
– Excellent UV and optical transparency
– High plasma etch resistance
– Superior plasma etch resistance when compared to SU8
– selectivity to silicon 9:1 (Si / mr-I T85)
– High chemical stability
– high resistance to acids, bases and polar solvents
– no interactions with conventional photoresists
Manufacturers:
