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Megaposit SPR3000 Series Photoresist

Megaposit SPR3000 Series Photoresist

 A positive photoresist which can be used and performs well in a wide range of applications.

Pack Sizes and Applications

US

QUARTS

US

GALLONS

  • i-line, g-line and broadband
  • Mix and match lithography

Material Features:

  • Versatile and ideally suited to several applications.
  • Works well for applications with high throughput and excellent process latitudes.
  • Provides maximum performance with robust process latitudes across many different exposure wavelengths.

Manufacturer: