MICROPOSIT EC Solvent 11
MICROPOSIT EC Solvent 11 is a solvent designed to eliminate the photoresist edge bead that occurs during typical spin coat wafer processing.
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Material Features:
- By removing the edge bead immediately after photoresist coating, MICROPOSIT EC Solvent 11 reduces the particulate-associated defects caused by subsequent wafer processing
- It can also be used to clean and purge photoresist dispense lines and spinner cup bowls