mr-I 9000M is a thermally curable polymer system (thermoset) designed for thermal nanoimprint lithography, especially for applications, where structures with outstanding thermal pattern stability are required. The mr-I 9000M series is provided as ready-to-use solutions for various film thickness ranges.
The cured polymer has high thermal and mechanical stability after the imprint process. This particularly enables imprinting and etching of dense nanostructure designs in the sub-100 nm ranges. Besides being applied as an etch mask for pattern transfer mr-I 9000M can also be used for permanent applications or bonding applications.
Product Features:
mr-I 9000M is a thermally curable polymer system (thermoset) designed for thermal nanoimprint lithography, especially for applications, where structures with outstanding thermal pattern stability are required. The mr-I 9000M series is provided as ready-to-use solutions for various film thickness ranges.
The cured polymer has high thermal and mechanical stability after the imprint process. This particularly enables imprinting and etching of dense nanostructure designs in the sub-100 nm ranges. Besides being applied as an etch mask for pattern transfer mr-I 9000M can also be used for permanent applications or bonding applications.
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