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PMGI/LOR

PMGI/LOR are Lift-off Resists designed for Metal Disposition Processing.

Pack Sizes and Applications:

500

ml

1

LITRE

4

LITRES

  • Data storage
  • III-V Semiconductors
  • Optoelectronics
  • Wireless ICs
  • MEMs

Material Features:

  • PMGI/LOR won't intermix when over-coated with most imaging resists
  • It has a high thermal stability; Tg> 195oC
  • It offers single step development of bi-layer stack in TMAH or KOH developers
  • It removes quickly and cleanly in conventional resist strippers
  • It enables high productivity in sub-0.25µm micron bi-layer resist imaging
  • It offers  high yield, very thick (>3µm) metal lift-off processing
  • These resists are available in a wide variety of formularies to meet almost any customer requirements.

Manufacturer: