UV 135
UV135 is an advanced gate resist for use across multiple pitches using a binary mask.
![](/dist/images/product-images/a-gas-em-gallon-bottle.png?width=700)
Material Attributes:
- Low iso-dense bias
- Maximum isolated film retention to <110 nm
- Compatible with PSM and OPC assist features to enlarge process
- Windows
UV135 is an advanced gate resist for use across multiple pitches using a binary mask.