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A-Gas EM announces strategic partnership with EM Resist to launch high-performance HSQ resists

A-Gas Electronic Materials is pleased to announce a new supplier partnership with EM Resist, marking the launch of an advanced HSQ resist product range for high-resolution applications.

This strategic addition to the A-Gas EM portfolio supports our commitment to supplying specialist chemicals and materials that enable the next generation of semiconductor innovation. EM Resist is recognised for its technical expertise and high-purity formulations, with products trusted by leading research institutes and nanofabrication labs across Europe.

The newly launched HSQ resists are designed for precise electron beam lithography (EBL), EUV, nanoimprint and Step and Flash Imprint Lithography (SFIL) processes, with sub-10nm resolution capability. They are available in a wide range of concentrations (1% to 45%) and offered in multiple formats to suit different customer needs and process environments:

  • Ready-to-use liquid resist
  • Powder for flexible dilution
  • Dilution kits with improved stability and extended shelf life
  • Multiple pack sizes, including low-volume options

A key benefit of EM Resist’s HSQ offering is the combination of performance and practicality. Users can expect excellent line edge roughness and high resolution, while also benefitting from improved lead times, shelf stability, and safe, easy-to-handle packaging. Whether you’re optimising film thickness or scaling up production, this flexible product range is built to support your process goals.

A perfect fit for R&D and production

The HSQ resist has already seen uptake in high-profile research settings, including the Paul Scherrer Institute, Max Planck Institute and XRnanotech, where its performance in both low and high concentration formats is helping to drive cutting-edge innovation in nanoscale fabrication.

A-Gas EM will now distribute these products across the UK, Ireland, Scandinavia and India, complementing our existing semiconductor and advanced packaging offering with an expanded lithography-grade range.

Supporting the future of lithography

Dr David Shaw, Business Manager for Semiconductor Technologies at A-Gas EM, comments: “This partnership reflects our ongoing strategy to support customers with high-specification materials that deliver both quality and process efficiency. EM Resist’s HSQ technology is already making an impact across advanced research and fabrication, and we’re excited to help more organisations access it through our distribution network.”

Learn more

To explore the full product specification and download the technical datasheet, visit our HSQ resists product page.