Hexamethyldisilazane (HMDS) is an adhesion promoter between photoresist and the silicon wafer.

Allows easy stripping of hard to remove photoresists and other materials plus improved adhesion

MICROPOSITPrimers are based upon hexamethyldisilizane (HMDS), a well-known chemical pretreatment for increasing photoresist adhesion to doped and undoped oxides, nitride, polysilicon, glass, quartz and other semiconductor surfaces.