AR602
AR602 is a developable organic bottom anti-reflectant for use in both KrF and ArF applications. It is designed for improved performance of critical implant layers while minimizing the negative effects of other implant solutions.
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Features and Benefits:
- AR602 has excellent reflection control and improves profile and CDU concerns of a traditional top anti-reflectant coating (TARC)
- AR602 eliminates the need for a BARC open etch, minimizing substrate damage and reducing additional process steps compared to traditional bottom anti-reflectant coatingIt has been formulated to work with a wide range of KrF and ArF photoresistsActing as a chemical barrier between photoresist and substrate, it presents a common substrate for all layersAR602 has a tunable dissolution rate; It can be optimised by cure temperature and develop timeIt is available in one dilution: AR602-510, which is formulated for coatings in the range of 450–600Å over reflective substrates