Megaposit™ MF-20A Series Developer
Megaposit™ MF-20A series Developers are surfactant-containing developers, designed to provide improved process latitude for both conventional and advanced resists over a wide range of developer normalities.
Material Features:
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Megaposit™ MF-20A Series Developer are effective across several resist technologies (including g-, g/h-, i-Line and DUV)
- Designed to increase wide process latitudes/high throughput
- Its uniform resist development avoids bubble and residue-related defects
- It offers an improved contrast for better lithographic performance
- It has a low-foaming formulation
- Its developer normalities include 0.21, 0.24, 0.26 and 0.27N.
Manufacturer:P
