MEGAPOSIT MF-20A Series Developer
MEGAPOSIT MF-20A series Developers are surfactant containing developers, designed to provide improved process latitude for both conventional and advanced resists over a wide range of developer normalities.
Material Features:
- MEGAPOSIT MF-20A Series Developer are effective across several resist technologies (including g-, g/h-, i-line and DUV)
- Designed to increase wide process latitudes/high throughput
- Its uniform resist development avoids bubble and residue-related defects
- It offers an improved contrast for better lithographic performance
- It has a low-foaming formulation
- Its developer normalities include 0.21, 0.24, 0.26 and 0.27N.
Manufacturer:P
