Megaposit SPR3000 Series Photoresist
Megaposit SPR3000 Series Photoresist
A positive photoresist which can be used and performs well in a wide range of applications.
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Pack Sizes and Applications
US
QUARTS
US
GALLONS
- i-line, g-line and broadband
- Mix and match lithography
Material Features:
- Versatile and ideally suited to several applications.
- Works well for applications with high throughput and excellent process latitudes.
- Provides maximum performance with robust process latitudes across many different exposure wavelengths.