UniLOR N
UniLOR N is a negative tone, chemically amplified proprietary co-polymer resist.
Pack Sizes and Applications:
500
ml
1
LITRE
4
LITRES
- Semiconductors
- MEMs
- Lift-off
Material Features:
- Suitable for use in UV lithography processing of semiconductors, MEMS and other nanofabricated structures
- Available in 3 standard viscosities
- Provides wall profile adjustability and high thermal stability across film thicknesses ranging from 1 to 5 μm in a single coat.
- Easily removable and compatible with a range of TMAH developers.
Manufacturer:
