UV™ 1116
UV1116 is a high temperature, Positive DUV Consolidation Photoresist suitable for Line/Space, Trench, and CH/Via applications.
Pack Sizes and Applications:
US
QUARTS
US
GALLONS
- Line/Space
- Trench
- CH/Via applications
Material Attributes:
- It gives excellent resolution across all FEOL and BEOL feature types
- Large process windows
Manufacturer:
