TempKoat P

TempKoat™ P is a chemically amplified, positive tone,
temporary resist formulated for advanced
packaging and MEMS applications. Specifically,
TempKoat™ P is capable of producing high aspect
ratio features from thick, single coatings. The unique
combination of photospeed and resolution, while
maintaining excellent chemical resistance and residue-
free removal, make it ideal for state-of-the-art
advanced packaging. TempKoat™ P 20 is the first
dilution available in the TempKoat™ P series.

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  • KAM TempKoat P Datasheet 7.13.22 final.pdf
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