mr I 7000R
- Excellent properties for thermal NIL
• Short cycle times due to fast polymer flow
• Sub-20 nm resolution
• Low residual layer thickness
• Low release forces - Longer lifetime of anti-sticking layers on the stamp
- High plasma etch resistance
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Product Features:
- Excellent properties for thermal NIL
• Short cycle times due to fast polymer flow
• Sub-20 nm resolution
• Low residual layer thickness
• Low release forces - Longer lifetime of anti-sticking layers on the stamp
- High plasma etch resistance