SPR660 is an advanced i-Line photoresist designed for processing 0.350 micron features and larger.
Pack Sizes and Applications:
- Line/Space and ContactHole
- Substrates including Silicon, Silicon Dioxide, Titanium Nitride and organic anti-reflectant coatings
- Performs well in Line/Space and ContactHole applications and various substrates
- Includes both undyed dilutions and two dye loadings (low and medium) for improved processing over reflective surfaces