SU 8 3000 CF DFR Series is a photosensitive permanent negative tone dry film resist Utilizing a low halogen epoxy resin and antimony-free formulation SU 8 3000 CF DFR enables the fabrication of chemically and thermally stable structures such as support walls and capping layers for SAW BAW Filter cavity packages, MEMS sensors and microfluidic devices
SU 8 3000 CF DFR Type S is standard grade SU8 3000 CF DFR (WF 1 has high transparency and low haze support film with same resist layer as SU 8 3000 CF DFR Type S WF 1 can be exposed through the support film to avoid mask contamination on the contact mask aligner
SU 8 3000 CF 02 DFR is designed to improve adhesion to substrates while keeping good thermal and mechanical properties CF 02 can be suitably used as a wall of the cavity structure because of good adhesion
Material Features
Antimony Free
Low Halogen (Total Chlorine 900 ppm)
Excellent Resolution and Aspect Ratio 3 1
Excellent Thermal Stability
Low Process Temperature
Low Water Absorption
Proven Reliability with No Delamination or Corrosion after HAST 85 ºC 85 RH 168 hr
Manufacturer
